Publication:

Understanding the effect of confinement in scanning spreading resistance microscopy measurements

Date

 
dc.contributor.authorPandey, Komal
dc.contributor.authorParedis, Kristof
dc.contributor.authorRobson, Alexander
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorPandey, Komal
dc.contributor.imecauthorParedis, Kristof
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecParedis, Kristof::0000-0002-5163-4164
dc.date.accessioned2021-10-29T01:47:18Z
dc.date.available2021-10-29T01:47:18Z
dc.date.issued2020
dc.identifier.doi10.1063/5.0011703
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/35698
dc.source.beginpage34303
dc.source.issue3
dc.source.journalJournal of Applied Physics
dc.source.volume128
dc.title

Understanding the effect of confinement in scanning spreading resistance microscopy measurements

dc.typeJournal article
dspace.entity.typePublication
Files

Original bundle

Name:
Understanding_the_effect_of_confinement_in_scanning_spreading_resistance_microscopy_measurements
Size:
1.98 MB
Format:
Adobe Portable Document Format
Description:
Not Applicable (or Unknown)
Publication available in collections: