Publication:

Continued dimensional scaling through projection lithography

Date

2024
Journal Article Review
https://doi.org/10.1016/j.mne.2024.100263
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Published version 5.52 MB

Author(s)

Ronse, Kurt  

Journal

MICRO AND NANO ENGINEERING

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469 since deposited on 2024-07-16
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487 since deposited on 2024-07-16
Acq. date: 2026-02-24

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