Publication:
Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerances
| dc.contributor.author | Kluge, Ines | |
| dc.contributor.author | Schulten, Michael | |
| dc.contributor.author | Mashayekh, Alireza Tabatabaei | |
| dc.contributor.author | Rodrigo, Rebecca | |
| dc.contributor.author | Ackermann, Manuel | |
| dc.contributor.author | Ghannam, Ibrahim | |
| dc.contributor.author | Stassen, Andim | |
| dc.contributor.author | Merget, Florian | |
| dc.contributor.author | Leisching, Patrick | |
| dc.contributor.author | Witzens, Jeremy | |
| dc.contributor.imecauthor | Stassen, Andim | |
| dc.contributor.orcidimec | Stassen, Andim::0000-0001-8819-9592 | |
| dc.date.accessioned | 2023-06-16T09:47:39Z | |
| dc.date.available | 2022-08-14T02:35:24Z | |
| dc.date.available | 2023-06-16T09:47:39Z | |
| dc.date.issued | 2022 | |
| dc.description.wosFundingText | The authors would like to acknowledge funding from the European Union under project PIX4life (688519) and from the German Federal Ministry of Education and Research for project HiPEQ (13N15965). | |
| dc.identifier.doi | 10.1117/12.2607615 | |
| dc.identifier.eisbn | 978-1-5106-4884-5 | |
| dc.identifier.isbn | 978-1-5106-4883-8 | |
| dc.identifier.issn | 0277-786X | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40260 | |
| dc.publisher | SPIE-INT SOC OPTICAL ENGINEERING | |
| dc.source.beginpage | 120060E | |
| dc.source.conference | Conference on Silicon Photonics XVII Part of SPIE Photonics West OPTO Conference | |
| dc.source.conferencedate | JAN 22-FEB 24, 2022 | |
| dc.source.conferencelocation | San Francisco | |
| dc.source.journal | Proceedings of SPIE | |
| dc.source.numberofpages | 9 | |
| dc.source.volume | 12006 | |
| dc.subject.keywords | LASER | |
| dc.title | Flip-chip-integrated silicon nitride ECL at 640nm with relaxed alignment tolerances | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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