Publication:

In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor

Date

2023
Journal article
https://doi.org/10.1116/6.0002493
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dc.contributor.authorClerix, Jan-Willem
dc.contributor.authorDianat, Golnaz
dc.contributor.authorDelabie, Annelies
dc.contributor.authorParsons, Gregory N.
dc.contributor.imecauthorClerix, Jan-Willem
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecClerix, Jan-Willem::0000-0002-2681-4569
dc.date.accessioned2023-12-12T08:07:59Z
dc.date.available2023-05-05T20:44:17Z
dc.date.available2023-07-04T08:17:52Z
dc.date.available2023-12-12T08:07:59Z
dc.date.embargo2023-09-30
dc.date.issued2023
dc.description.wosFundingTextThe authors acknowledge support from the Electronic Component Systems for European Leadership Joint Undertaking under the Grant Agreement No. 692522. The authors also acknowledge funding from the Semiconductor Research Corporation, Task 2974.001. Jan-Willem Clerix acknowledges funding from The Research Foundation - Flanders (FWO) for a Ph.D. fellowship strategic basic research (Project No. 1SB4321N).
dc.identifier.doi10.1116/6.0002493
dc.identifier.issn0734-2101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41569
dc.publisherA V S AMER INST PHYSICS
dc.source.beginpageArt. 032406
dc.source.endpagena
dc.source.issue3
dc.source.journalJOURNAL OF VACUUM SCIENCE & TECHNOLOGY A
dc.source.numberofpages11
dc.source.volume41
dc.subject.keywordsSELF-LIMITING FLUORINATION
dc.subject.keywordsAREA-SELECTIVE DEPOSITION
dc.subject.keywordsCHEMICAL-VAPOR-DEPOSITION
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsTRIMETHYLALUMINUM
dc.subject.keywordsSILICON
dc.subject.keywordsCHEMISORPTION
dc.subject.keywordsPASSIVATION
dc.subject.keywordsOXIDE
dc.subject.keywordsFTIR
dc.title

In situ analysis of nucleation reactions during TiCl4/H2O atomic layer deposition on SiO2 and H-terminated Si surfaces treated with a silane small molecule inhibitor

dc.typeJournal article
dspace.entity.typePublication
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