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A detailed study on the growth of thin oxide layers on silicon using ozonated solutions
Publication:
A detailed study on the growth of thin oxide layers on silicon using ozonated solutions
Date
2000
Journal article
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Smedt, Frank
;
Vinckier, Chris
;
Cornelissen, Ingrid
;
De Gendt, Stefan
;
Heyns, Marc
Journal
Journal of the Electrochemical Society
Abstract
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1998
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1998
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations