Publication:

Ni(Pt)Si thermal stability improvement by carbon implantation

Date

2008
Proceedings Paper
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Author(s)

Mertens, Sofie  
;
Hoffmann, Thomas Y.
;
Vrancken, Christa  
;
Jakschik, Stefan
;
Richard, Olivier  
;
Verleysen, Eveline
;
Bender, Hugo  
;
Zhao, Chao
;
Vandervorst, Wilfried  
;
Absil, Philippe  
;
Lauwers, Anne  

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1916 since deposited on 2021-10-17
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