Publication:
The mechanism of low-k SiOCH film modification by oxygen atoms
Date
Loading...
Files
Journal
Abstract
Description
Statistics
Views
1920 since deposited on 2021-10-18
7last month
2last week
Acq. date: 2026-09-19
Citations
Statistics
Views
1920 since deposited on 2021-10-18
7last month
2last week
Acq. date: 2026-09-19
Citations