Publication:
Thermomechanical design and modeling of porous alumina-based thin film packages for MEMS
Date
| dc.contributor.author | Zekry, Joseph | |
| dc.contributor.author | Vandevelde, Bart | |
| dc.contributor.author | Bouwstra, Siebe | |
| dc.contributor.author | Puers, Bob | |
| dc.contributor.author | Van Hoof, Chris | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Vandevelde, Bart | |
| dc.contributor.imecauthor | Puers, Bob | |
| dc.contributor.imecauthor | Van Hoof, Chris | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | Vandevelde, Bart::0000-0002-6753-6438 | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-19T00:54:10Z | |
| dc.date.available | 2021-10-19T00:54:10Z | |
| dc.date.issued | 2010-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18406 | |
| dc.source.conference | 11th International Conference on Thermal, Mechanical and Multiphysics Simulation and Experiments in Micro-Electronics - EuroSimE | |
| dc.source.conferencedate | 26/04/2010 | |
| dc.source.conferencelocation | Bordeaux France | |
| dc.title | Thermomechanical design and modeling of porous alumina-based thin film packages for MEMS | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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