Publication:

Epitaxial growth in advanced SiGe and Ge MOS devices: challenges and solutions

Date

2012

Proceedings Paper

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Author(s)

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Vincent, Benjamin

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Hikavyy, Andriy

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Gencarelli, Federica

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;

Witters, Liesbeth

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;

Hellings, Geert

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;

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;

Vandervorst, Wilfried

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Statistics

1786 since deposited on 2021-10-20

Acq. date: 2026-08-03