Publication:

Small pitch, high aspect ratio via-last TSV module

Date

2016

Proceedings Paper

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Author(s)

Van Huylenbroeck, Stefaan

;

Stucchi, Michele

;

;

Slabbekoorn, John

;

Tutunjyan, Nina

;

;

Jourdan, Nicolas

;

Bogaerts, Lieve

;

Beirnaert, Filip

;

;

Statistics

2062 since deposited on 2021-10-23

Acq. date: 2026-02-24