Publication:

Evaluation of Nb(Si)N as metal gate material

Date

2005

Meeting abstract

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Author(s)

Van Hoornick, Nausikaa

;

De Witte, Hilde

;

Witters, Thomas

;

;

Conard, Thierry

;

;

;

;

;

De Gendt, Stefan

;

Statistics

1980 since deposited on 2021-10-16

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Acq. date: 2026-04-06