Publication:

Evaluation of Nb(Si)N as metal gate material

Date

2005
Meeting abstract
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Author(s)

Van Hoornick, Nausikaa  
;
De Witte, Hilde
;
Witters, Thomas  
;
Zhao, Chao
;
Conard, Thierry  
;
Huatori, H.
;
Swerts, Johan  
;
Schram, Tom  
;
Maes, Jan  
;
De Gendt, Stefan  
;
Heyns, Marc  

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