Publication:

Evaluation of Nb(Si)N as metal gate material

Date

2005
Meeting abstract
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dc.contributor.authorVan Hoornick, Nausikaa
dc.contributor.authorDe Witte, Hilde
dc.contributor.authorWitters, Thomas
dc.contributor.authorZhao, Chao
dc.contributor.authorConard, Thierry
dc.contributor.authorHuatori, H.
dc.contributor.authorSwerts, Johan
dc.contributor.authorSchram, Tom
dc.contributor.authorMaes, Jan
dc.contributor.authorDe Gendt, Stefan
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorVan Hoornick, Nausikaa
dc.contributor.imecauthorWitters, Thomas
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-16T06:11:51Z
dc.date.available2021-10-16T06:11:51Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11401
dc.source.conferenceMeeting Abstracts 208th Electrochemical Society Meeting
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
dc.title

Evaluation of Nb(Si)N as metal gate material

dc.typeMeeting abstract
dspace.entity.typePublication
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