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Oxygen in Si epitaxial growth: from interface contamination to Si/O superlattice engineering
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Oxygen in Si epitaxial growth: from interface contamination to Si/O superlattice engineering
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Date
2013-06
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Caymax, Matty
;
Jayachandran, Suseendran
;
Lu, Augustin
;
Delabie, Annelies
;
Loo, Roger
;
Hikavyy, Andriy
;
Pourtois, Geoffrey
;
Vandervorst, Wilfried
;
Heyns, Marc
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1980
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Acq. date: 2025-12-15
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Views
1980
since deposited on 2021-10-21
3
last month
1
last week
Acq. date: 2025-12-15
Citations