Publication:
Mobility and dielectric quality of 1-nm EOT HfSiON on Si(110) and (100)
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1918 since deposited on 2021-10-17
7last month
1last week
Acq. date: 2026-01-25
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Statistics
Views
1918 since deposited on 2021-10-17
7last month
1last week
Acq. date: 2026-01-25
Citations