Publication:
Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
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1594 since deposited on 2021-11-02
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Acq. date: 2026-10-04
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Statistics
Views
1594 since deposited on 2021-11-02
2last month
1last week
Acq. date: 2026-10-04
Citations