Publication:
Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
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1590 since deposited on 2021-11-02
3last month
Acq. date: 2025-12-12
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Metrics
Views
1590 since deposited on 2021-11-02
3last month
Acq. date: 2025-12-12
Citations