Publication:
Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET
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1592 since deposited on 2021-11-02
1last month
Acq. date: 2026-05-30
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Statistics
Views
1592 since deposited on 2021-11-02
1last month
Acq. date: 2026-05-30
Citations