Publication:

Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET

Date

2021
Journal article
https://doi.org/10.1088/1361-6528/abd278
Simple item page Full metadata Statistics
 
dc.contributor.authorLee, Kookjin
dc.contributor.authorKim, Yeonsu
dc.contributor.authorLee, Hyebin
dc.contributor.authorPark, Sojeong
dc.contributor.authorLee, Yongwoo
dc.contributor.authorJoo, Min-Kyu
dc.contributor.authorJi, Hyunjin
dc.contributor.authorLee, Jaewoo
dc.contributor.authorChun, Jungu
dc.contributor.authorSung, Moonsoo
dc.contributor.authorCho, Young-Hoon
dc.contributor.authorKim, Doyoon
dc.contributor.authorChoi, Junhee
dc.contributor.authorLee, Jae Woo
dc.contributor.authorJeon, Dae-Young
dc.contributor.authorChoi, Sung-Jin
dc.contributor.authorKim, Gyu-Tae
dc.contributor.imecauthorLee, Kookjin
dc.contributor.orcidextLee, Yongwoo::0000-0003-3224-1960
dc.contributor.orcidextJoo, Min-Kyu::0000-0001-7537-1015
dc.contributor.orcidimecLee, Kookjin::0000-0002-9896-1090
dc.date.accessioned2022-09-22T13:43:38Z
dc.date.available2021-11-02T16:05:48Z
dc.date.available2022-09-22T13:43:38Z
dc.date.issued2021
dc.identifier.doi10.1088/1361-6528/abd278
dc.identifier.issn0957-4484
dc.identifier.pmidMEDLINE:33302263
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/38229
dc.publisherIOP PUBLISHING LTD
dc.source.beginpage165202
dc.source.endpagena
dc.source.issue16
dc.source.journalNANOTECHNOLOGY
dc.source.numberofpages9
dc.source.volume32
dc.title

Defect spectroscopy of sidewall interfaces in gate-all-around silicon nanosheet FET

dc.typeJournal article
dspace.entity.typePublication
Files
Publication available in collections:
Articles