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Does strain engineering impact the gate stack quality and reliability?
Publication:
Does strain engineering impact the gate stack quality and reliability?
Date
2007
Proceedings Paper
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15906.pdf
369 KB
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Claeys, Cor
;
Simoen, Eddy
;
Giusi, G.
;
Crupi, F.
Journal
Abstract
Description
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1923
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations
Metrics
Views
1923
since deposited on 2021-10-16
Acq. date: 2025-10-24
Citations