Does strain engineering impact the gate stack quality and reliability?

dc.contributor.author	Claeys, Cor
dc.contributor.author	Simoen, Eddy
dc.contributor.author	Giusi, G.
dc.contributor.author	Crupi, F.
dc.contributor.imecauthor	Simoen, Eddy
dc.contributor.orcidimec	Simoen, Eddy::0000-0002-5218-4046
dc.date.accessioned	2021-10-16T15:20:10Z
dc.date.available	2021-10-16T15:20:10Z
dc.date.embargo	9999-12-31
dc.date.issued	2007
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/11880
dc.source.beginpage	101
dc.source.conference	ULSI Process Integration 5
dc.source.conferencedate	7/10/2007
dc.source.conferencelocation	Washington, DC USA
dc.source.endpage	114
dc.title	Does strain engineering impact the gate stack quality and reliability?
dc.type	Proceedings paper
dspace.entity.type	Publication
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