Publication:

SILC and TDDB reliability of novel low thermal budget RMG gate stacks

Date

2024

Proceedings Paper

https://doi.org/10.1109/IRPS48228.2024.10529347

Simple item page Full metadata Statistics

Author(s)

;

Degraeve, Robin

;

Horiguchi, Naoto

;

De Wolf, Ingrid

;

Journal

N/A

Statistics

588 since deposited on 2024-08-16

1last month

Acq. date: 2026-05-17