Publication:

SILC and TDDB reliability of novel low thermal budget RMG gate stacks

Date

2024
Proceedings Paper
https://doi.org/10.1109/IRPS48228.2024.10529347
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dc.contributor.authorVici, Andrea
dc.contributor.authorDegraeve, Robin
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorFranco, Jacopo
dc.contributor.imecauthorVici, Andrea
dc.contributor.imecauthorDegraeve, Robin
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.orcidimecVici, Andrea::0000-0002-3614-9590
dc.contributor.orcidimecDegraeve, Robin::0000-0002-4609-5573
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.date.accessioned2024-09-19T10:08:15Z
dc.date.available2024-08-16T18:28:44Z
dc.date.available2024-09-19T10:08:15Z
dc.date.issued2024
dc.identifier.doi10.1109/IRPS48228.2024.10529347
dc.identifier.eisbn979-8-3503-6976-2
dc.identifier.isbn979-8-3503-6977-9
dc.identifier.issn1541-7026
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44327
dc.publisherIEEE
dc.source.conferenceInternational Reliability Physics Symposium (IRPS)
dc.source.conferencedateAPR 14-18, 2024
dc.source.conferencelocationGrapevine
dc.source.journalN/A
dc.source.numberofpages6
dc.subject.keywordsTRAP GENERATION
dc.subject.keywordsOXIDE
dc.subject.keywordsDEGRADATION
dc.title

SILC and TDDB reliability of novel low thermal budget RMG gate stacks

dc.typeProceedings paper
dspace.entity.typePublication
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