Publication:
Process development for a novel low loss and non-PFAS photo imageable dielectric for RF silicon interposer applications
| dc.contributor.author | Jafarpoorchekab, Hamideh | |
| dc.contributor.author | Sun, Xiao | |
| dc.contributor.author | Uruena, Angel | |
| dc.contributor.author | Sinha, Siddhartha | |
| dc.contributor.author | Pinho, Nelson | |
| dc.contributor.author | Miller, Andy | |
| dc.contributor.author | Collaert, Nadine | |
| dc.contributor.imecauthor | Jafarpoorchekab, Hamideh | |
| dc.contributor.imecauthor | Sun, Xiao | |
| dc.contributor.imecauthor | Uruena, Angel | |
| dc.contributor.imecauthor | Sinha, Siddhartha | |
| dc.contributor.imecauthor | Pinho, Nelson | |
| dc.contributor.imecauthor | Miller, Andy | |
| dc.contributor.imecauthor | Collaert, Nadine | |
| dc.contributor.orcidimec | Jafarpoorchekab, Hamideh::0009-0008-8524-0885 | |
| dc.contributor.orcidimec | Sun, Xiao::0000-0002-2468-8933 | |
| dc.contributor.orcidimec | Uruena, Angel::0000-0001-8559-5063 | |
| dc.contributor.orcidimec | Sinha, Siddhartha::0000-0003-4025-2854 | |
| dc.contributor.orcidimec | Pinho, Nelson::0000-0002-0701-5921 | |
| dc.contributor.orcidimec | Miller, Andy::0000-0001-7048-2242 | |
| dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
| dc.date.accessioned | 2025-06-30T11:51:05Z | |
| dc.date.available | 2025-06-21T03:56:15Z | |
| dc.date.available | 2025-06-30T11:51:05Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/3DIC63395.2024.10830178 | |
| dc.identifier.eisbn | 979-8-3315-1650-5 | |
| dc.identifier.isbn | 979-8-3315-1651-2 | |
| dc.identifier.issn | 2164-0157 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45818 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International 3D Systems Integration Conference | |
| dc.source.conferencedate | SEP 25-27, 2024 | |
| dc.source.conferencelocation | Sendai | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 6 | |
| dc.subject.keywords | WAVE PHASED-ARRAYS | |
| dc.title | Process development for a novel low loss and non-PFAS photo imageable dielectric for RF silicon interposer applications | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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