Publication:
Optimizing i-line lithography for 0.3-μm poly-gate manufacturing
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2 since deposited on 2021-09-30
Acq. date: 2025-10-23
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1916 since deposited on 2021-09-30
Acq. date: 2025-10-23
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2 since deposited on 2021-09-30
Acq. date: 2025-10-23
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1916 since deposited on 2021-09-30
Acq. date: 2025-10-23
Citations