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Articles
Optimizing i-line lithography for 0.3-μm poly-gate manufacturing
Publication:
Optimizing i-line lithography for 0.3-μm poly-gate manufacturing
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Date
1997
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1852.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Finders, Jo
;
Tzviatkov, Plamen
;
Ronse, Kurt
;
Van den hove, Luc
Journal
Solid State Technology
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2
since deposited on 2021-09-30
Acq. date: 2026-01-08
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1918
since deposited on 2021-09-30
2
last month
2
last week
Acq. date: 2026-01-08
Citations
Metrics
Downloads
2
since deposited on 2021-09-30
Acq. date: 2026-01-08
Views
1918
since deposited on 2021-09-30
2
last month
2
last week
Acq. date: 2026-01-08
Citations