Publication:

Combined illumination sources for hyper-NA contact hole printing

Date

2007
Journal article
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dc.contributor.authorBekaert, Joost
dc.contributor.authorTruffert, Vincent
dc.contributor.authorWillems, Patrick
dc.contributor.authorVan Look, Lieve
dc.contributor.authorOp de Beeck, Maaike
dc.contributor.authorHendrickx, Eric
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorTruffert, Vincent
dc.contributor.imecauthorWillems, Patrick
dc.contributor.imecauthorVan Look, Lieve
dc.contributor.imecauthorOp de Beeck, Maaike
dc.contributor.imecauthorHendrickx, Eric
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecTruffert, Vincent::0000-0001-7851-830X
dc.contributor.orcidimecOp de Beeck, Maaike::0000-0002-2700-6432
dc.date.accessioned2021-10-16T15:03:23Z
dc.date.available2021-10-16T15:03:23Z
dc.date.issued2007
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11709
dc.identifier.urlhttp://sst.pennnet.com/display_article/308911/5/ARTCL/none/none/IMEC-achiev
dc.source.beginpage48
dc.source.endpage50
dc.source.issue11
dc.source.journalSolid State Technology
dc.source.volume50
dc.title

Combined illumination sources for hyper-NA contact hole printing

dc.typeJournal article
dspace.entity.typePublication
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