Publication:
Investigation of Low-n Mask in 0.33NA EUV Single Patterning at Pitch 28nm Metal Design
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820 since deposited on 2022-09-19
42last month
9last week
Acq. date: 2026-04-26
Views
1573 since deposited on 2022-09-19
Acq. date: 2026-04-26
Citations