Publication:
Investigation of Low-n Mask in 0.33NA EUV Single Patterning at Pitch 28nm Metal Design
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767 since deposited on 2022-09-19
47last month
10last week
Acq. date: 2026-03-17
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1573 since deposited on 2022-09-19
Acq. date: 2026-03-17
Citations