Publication:

Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers

Date

2018
Proceedings Paper
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Author(s)

Lariviere, Stephane  
;
Wilson, Chris  
;
Kutrzeba Kotowska, Bogumila  
;
Versluijs, Janko  
;
Decoster, Stefan  
;
Mao, Ming  
;
van der Veen, Marleen  
;
Jourdan, Nicolas  
;
El-Mekki, Zaid  
;
Heylen, Nancy  
;
Kesters, Els  
;
Verdonck, Patrick  
;
Beral, Christophe  
;
Van Den Heuvel, Dieter  
;
De Bisschop, Peter  
;
Bekaert, Joost  
;
Blanco, Victor  
;
Ciofi, Ivan  
;
Wan, Danny  
;
Briggs, Basoene  
;
Mallik, Arindam  
;
Hendrickx, Eric  
;
Kim, Ryan Ryoung han
;
McIntyre, Greg
;
Ronse, Kurt  
;
Boemmels, Juergen  
;
Tokei, Zsolt  
;
Mocuta, Dan

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1995 since deposited on 2021-10-25
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1995 since deposited on 2021-10-25
Acq. date: 2025-12-11

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