Publication:

Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers

Date

2018
Proceedings Paper
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dc.contributor.authorLariviere, Stephane
dc.contributor.authorWilson, Chris
dc.contributor.authorKutrzeba Kotowska, Bogumila
dc.contributor.authorVersluijs, Janko
dc.contributor.authorDecoster, Stefan
dc.contributor.authorMao, Ming
dc.contributor.authorvan der Veen, Marleen
dc.contributor.authorJourdan, Nicolas
dc.contributor.authorEl-Mekki, Zaid
dc.contributor.authorHeylen, Nancy
dc.contributor.authorKesters, Els
dc.contributor.authorVerdonck, Patrick
dc.contributor.authorBeral, Christophe
dc.contributor.authorVan Den Heuvel, Dieter
dc.contributor.authorDe Bisschop, Peter
dc.contributor.authorBekaert, Joost
dc.contributor.authorBlanco, Victor
dc.contributor.authorCiofi, Ivan
dc.contributor.authorWan, Danny
dc.contributor.authorBriggs, Basoene
dc.contributor.imecauthorLariviere, Stephane
dc.contributor.imecauthorWilson, Chris
dc.contributor.imecauthorKutrzeba Kotowska, Bogumila
dc.contributor.imecauthorVersluijs, Janko
dc.contributor.imecauthorDecoster, Stefan
dc.contributor.imecauthorMao, Ming
dc.contributor.imecauthorvan der Veen, Marleen
dc.contributor.imecauthorJourdan, Nicolas
dc.contributor.imecauthorEl-Mekki, Zaid
dc.contributor.imecauthorHeylen, Nancy
dc.contributor.imecauthorKesters, Els
dc.contributor.imecauthorVerdonck, Patrick
dc.contributor.imecauthorBeral, Christophe
dc.contributor.imecauthorVan Den Heuvel, Dieter
dc.contributor.imecauthorDe Bisschop, Peter
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorBlanco, Victor
dc.contributor.imecauthorCiofi, Ivan
dc.contributor.imecauthorWan, Danny
dc.contributor.imecauthorBriggs, Basoene
dc.contributor.orcidimecDecoster, Stefan::0000-0003-1162-9288
dc.contributor.orcidimecvan der Veen, Marleen::0000-0002-9402-8922
dc.contributor.orcidimecVerdonck, Patrick::0000-0003-2454-0602
dc.contributor.orcidimecBeral, Christophe::0000-0003-1356-9186
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.contributor.orcidimecCiofi, Ivan::0000-0003-1374-4116
dc.contributor.orcidimecWan, Danny::0000-0003-4847-3184
dc.contributor.orcidimecMallik, Arindam::0000-0002-0742-9366
dc.contributor.orcidimecRonse, Kurt::0000-0003-0803-4267
dc.date.accessioned2021-10-25T21:32:54Z
dc.date.available2021-10-25T21:32:54Z
dc.date.embargo9999-12-31
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31120
dc.identifier.urlhttps://doi.org/10.1117/12.2299389
dc.source.beginpage105830U
dc.source.conferenceExtreme Ultraviolet (EUV) Lithography IX
dc.source.conferencedate25/02/2018
dc.source.conferencelocationSan Jose, CA USA
dc.title

Electrical comparison of iN7 EUV hybrid and EUV single patterning BEOL metal layers

dc.typeProceedings paper
dspace.entity.typePublication
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