Publication:
A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
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1992 since deposited on 2021-10-16
2last month
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Acq. date: 2026-01-06
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1992 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-06
Citations