Publication:
A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1999 since deposited on 2021-10-16
Acq. date: 2026-06-12
Citations
Statistics
Views
1999 since deposited on 2021-10-16
Acq. date: 2026-06-12
Citations