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A Dy2O3-capped HfO2 dielectric and TaCx-based metals enabling low-Vt single-metal-single-dielectric gate stack

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1986 since deposited on 2021-10-16
Acq. date: 2025-10-23

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1986 since deposited on 2021-10-16
Acq. date: 2025-10-23

Citations