Publication:

Addressing key concerns for implementation of Ni FUSI into manufacturing for 45/32 nm CMOS

Date

2007
Proceedings Paper
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Author(s)

Shickova, Adelina
;
Kauerauf, Thomas
;
Rothschild, Aude
;
Aoulaiche, Marc
;
Sahhaf, Sahar  
;
Kaczer, Ben  
;
Veloso, Anabela  
;
Torregiani, Cristina
;
Pantisano, Luigi
;
Lauwers, Anne  
;
Zahid, Mohammed
;
Rost, Tim
;
Tigelaar, H.
;
Pas, M.
;
Fretwell, J.
;
McCormack, J.
;
Hoffmann, Thomas
;
Kerner, Christoph  
;
Chiarella, Thomas  
;
Brus, Stephan  
;
Harada, Yoshinao
;
Niwa, Masaaki
;
Kaushik, Vidya
;
Maes, Herman
;
Absil, Philippe  
;
Groeseneken, Guido  
;
Biesemans, Serge  
;
Kittl, Jorge

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1961 since deposited on 2021-10-16
Acq. date: 2026-04-06

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1961 since deposited on 2021-10-16
Acq. date: 2026-04-06

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