Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Publication:
Composition control and ferroelectric properties of sidewall Sr0.8Bi2.2Ta2O9 in integrated 3-Dimensional ferroelectric capacitors
Copy permalink
Date
2005
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Goux, Ludovic
;
Lisoni, Judit
;
Schwitters, Michael
;
Paraschiv, Vasile
;
Maes, D.
;
Haspeslagh, Luc
;
Wouters, Dirk
;
Menou, M.
;
Turquat, Ch.
;
Madigou, V.
;
Muller, Ch.
;
Zambrano, R.
Journal
Abstract
Description
Metrics
Views
1921
since deposited on 2021-10-16
Acq. date: 2025-12-09
Citations
Metrics
Views
1921
since deposited on 2021-10-16
Acq. date: 2025-12-09
Citations