Publication:
Defect assessment control and engineering in advanced homo- and hetero-epitaxial device structures
Date
| dc.contributor.author | Bargallo Gonzalez, Mireia | |
| dc.contributor.thesisadvisor | Claeys, Cor | |
| dc.date.accessioned | 2021-10-19T12:31:38Z | |
| dc.date.available | 2021-10-19T12:31:38Z | |
| dc.date.issued | 2011-04 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/18527 | |
| dc.title | Defect assessment control and engineering in advanced homo- and hetero-epitaxial device structures | |
| dc.type | PHD thesis | |
| dspace.entity.type | Publication | |
| Files | ||
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