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Physical degradation of gate dielectrics induced by local electrical stress using conductive atomic force microscopy
Publication:
Physical degradation of gate dielectrics induced by local electrical stress using conductive atomic force microscopy
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Date
2009
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Polspoel, Wouter
;
Favia, Paola
;
Mody, Jay
;
Bender, Hugo
;
Vandervorst, Wilfried
Journal
Journal of Applied Physics
Abstract
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1836
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-16
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Metrics
Views
1836
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-16
Citations