Skip to content
Institutional repository
Communities & Collections
Browse
Site
Log In
imec Publications
Articles
Dissolution rate monitor tool to measure EUV photoresist dissolution
Publication:
Dissolution rate monitor tool to measure EUV photoresist dissolution
Date
2017
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Vesters, Yannick
;
De Simone, Danilo
;
De Gendt, Stefan
Journal
Journal of Photopolymer Science and Technology
Abstract
Description
Metrics
Views
1912
since deposited on 2021-10-24
410
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations
Metrics
Views
1912
since deposited on 2021-10-24
410
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations