Publication:

Dissolution rate monitor tool to measure EUV photoresist dissolution

Date

2017
Journal article
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dc.contributor.authorVesters, Yannick
dc.contributor.authorDe Simone, Danilo
dc.contributor.authorDe Gendt, Stefan
dc.contributor.imecauthorDe Simone, Danilo
dc.contributor.imecauthorDe Gendt, Stefan
dc.contributor.orcidimecDe Simone, Danilo::0000-0003-3927-5207
dc.contributor.orcidimecDe Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned2021-10-24T18:10:49Z
dc.date.available2021-10-24T18:10:49Z
dc.date.issued2017
dc.identifier.issn0914-9244
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29868
dc.source.beginpage675
dc.source.endpage681
dc.source.issue6
dc.source.journalJournal of Photopolymer Science and Technology
dc.source.volume30
dc.title

Dissolution rate monitor tool to measure EUV photoresist dissolution

dc.typeJournal article
dspace.entity.typePublication
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