Publication:

Low-temperature Ge and GeSn chemical vapor deposition using Ge2H6

Date

2012

Journal article

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Files

23093.pdf 1.01 MB

Author(s)

Gencarelli, Federica

;

Vincent, Benjamin

;

Souriau, Laurent

;

Richard, Olivier

;

Vandervorst, Wilfried

;

;

;

Journal

Thin Solid Films

Statistics

1899 since deposited on 2021-10-20

Acq. date: 2026-04-05