Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics

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Author(s)

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Takabayashi, Alain Yuji

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Edinger, Pierre

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Gylfason, Kristinn B.

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Verheyen, Peter

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Jezzini, Moises

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Khan, Muhammad Umar

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Journal

na

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1400 since deposited on 2022-11-07

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Acq. date: 2025-10-24