Publication:
Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics
| dc.contributor.author | Quack, Niels | |
| dc.contributor.author | Takabayashi, Alain Yuji | |
| dc.contributor.author | Sattari, Hamed | |
| dc.contributor.author | Edinger, Pierre | |
| dc.contributor.author | Gylfason, Kristinn B. | |
| dc.contributor.author | Jo, Geahun | |
| dc.contributor.author | Niklaus, Frank | |
| dc.contributor.author | Verheyen, Peter | |
| dc.contributor.author | Jezzini, Moises | |
| dc.contributor.author | Khan, Muhammad Umar | |
| dc.contributor.author | Zand, Iman | |
| dc.contributor.author | Bogaerts, Wim | |
| dc.contributor.imecauthor | Verheyen, Peter | |
| dc.contributor.imecauthor | Khan, Muhammad Umar | |
| dc.contributor.imecauthor | Zand, Iman | |
| dc.contributor.imecauthor | Bogaerts, Wim | |
| dc.contributor.orcidimec | Verheyen, Peter::0000-0002-8245-9442 | |
| dc.contributor.orcidimec | Zand, Iman::0000-0001-9857-7331 | |
| dc.contributor.orcidimec | Bogaerts, Wim::0000-0003-1112-8950 | |
| dc.contributor.orcidimec | Khan, Muhammad Umar::0000-0001-5760-7485 | |
| dc.date.accessioned | 2023-01-17T10:21:22Z | |
| dc.date.available | 2022-11-07T02:55:17Z | |
| dc.date.available | 2023-01-17T10:21:22Z | |
| dc.date.issued | 2021 | |
| dc.identifier.doi | 10.1109/IPC48725.2021.9593009 | |
| dc.identifier.eisbn | 978-1-6654-1601-6 | |
| dc.identifier.issn | 2374-0140 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/40688 | |
| dc.publisher | IEEE | |
| dc.source.conference | Annual Conference of the IEEE-Photonics-Society (IPC) | |
| dc.source.conferencedate | OCT 18-21, 2021 | |
| dc.source.conferencelocation | Vancouver | |
| dc.source.journal | na | |
| dc.source.numberofpages | 2 | |
| dc.title | Scalable Nano-Opto-Electromechanical Systems in Silicon Photonics | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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