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Conference contributions
Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns
Publication:
Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns
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Date
2018
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Spiesser, Martin
;
Kulmala, Tero
;
Chan, BT
;
de Marneffe, Jean-Francois
;
Knoll, Armin
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Abstract
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1877
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Acq. date: 2026-02-26
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Statistics
Views
1877
since deposited on 2021-10-26
1
last month
Acq. date: 2026-02-26
Citations