Publication:
Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns
Date
| dc.contributor.author | Spiesser, Martin | |
| dc.contributor.author | Kulmala, Tero | |
| dc.contributor.author | Chan, BT | |
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Knoll, Armin | |
| dc.contributor.imecauthor | Chan, BT | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.orcidimec | Chan, BT::0000-0003-2890-0388 | |
| dc.date.accessioned | 2021-10-26T04:30:36Z | |
| dc.date.available | 2021-10-26T04:30:36Z | |
| dc.date.issued | 2018 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/31839 | |
| dc.identifier.url | https://ald2018.avs.org/ | |
| dc.source.conference | ALD Conference | |
| dc.source.conferencedate | 29/07/2018 | |
| dc.source.conferencelocation | Incheon Korea | |
| dc.title | Sequential infiltration synthesis for pattern transfer of sub 20 nm thermal scanning probe lithography patterns | |
| dc.type | Meeting abstract | |
| dspace.entity.type | Publication | |
| Files | ||
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