Publication:
Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1850 since deposited on 2021-10-14
3last month
1last week
Acq. date: 2025-12-11
Citations
Metrics
Views
1850 since deposited on 2021-10-14
3last month
1last week
Acq. date: 2025-12-11
Citations