Publication:
Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
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1852 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-09
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Statistics
Views
1852 since deposited on 2021-10-14
2last month
Acq. date: 2026-08-09
Citations