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Influence of pre and post process conditions on the composition of thin Si3N4 thin films (3nm) studied by XPS and TOFSIMS
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1847 since deposited on 2021-10-14
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Acq. date: 2025-10-24
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Views
1847 since deposited on 2021-10-14
419item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations