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Dopant/carrier profiling for sub-45 nm semiconductor technologies

Date

2005
Meeting abstract
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dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-10-16T06:32:46Z
dc.date.available2021-10-16T06:32:46Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/11461
dc.source.conferencePhysical and Electrical Characterization of Materials and Devices for Silicon Nanoelectronics
dc.source.conferencedate11/06/2005
dc.source.conferencelocationAutrans Frankrijk
dc.title

Dopant/carrier profiling for sub-45 nm semiconductor technologies

dc.typeMeeting abstract
dspace.entity.typePublication
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