Publication:
Characteristics of selective epitaxial SiGe deposition processes for recesssed source/drain applications
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1913 since deposited on 2021-10-16
2last month
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Acq. date: 2025-12-08
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Views
1913 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2025-12-08
Citations