Publication:
Characteristics of selective epitaxial SiGe deposition processes for recesssed source/drain applications
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1917 since deposited on 2021-10-16
3last month
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Acq. date: 2026-02-27
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Statistics
Views
1917 since deposited on 2021-10-16
3last month
1last week
Acq. date: 2026-02-27
Citations