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An experimental study of the growth mechanism of TiO2 Atomic Layer Deposition on surface modified nanoporous low-k films
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1948 since deposited on 2021-10-21
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Acq. date: 2026-03-01
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1948 since deposited on 2021-10-21
1last month
1last week
Acq. date: 2026-03-01
Citations