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Study of the anisotropic wet etching of nanoscale structures in alkaline solutions
Publication:
Study of the anisotropic wet etching of nanoscale structures in alkaline solutions
Date
2018
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Pacco, Antoine
;
Aabdin, Zainul
;
Anand, Utkarsh
;
Rip, Jens
;
Mirsaidov, Utkur
;
Holsteyns, Frank
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2066
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations
Metrics
Views
2066
since deposited on 2021-10-26
Acq. date: 2025-10-23
Citations