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Study of the anisotropic wet etching of nanoscale structures in alkaline solutions

Date

2018
Proceedings Paper
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dc.contributor.authorPacco, Antoine
dc.contributor.authorAabdin, Zainul
dc.contributor.authorAnand, Utkarsh
dc.contributor.authorRip, Jens
dc.contributor.authorMirsaidov, Utkur
dc.contributor.authorHolsteyns, Frank
dc.contributor.imecauthorPacco, Antoine
dc.contributor.imecauthorRip, Jens
dc.contributor.imecauthorHolsteyns, Frank
dc.date.accessioned2021-10-26T00:36:43Z
dc.date.available2021-10-26T00:36:43Z
dc.date.issued2018
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/31467
dc.identifier.urlhttps://www.scientific.net/SSP.282.88
dc.source.beginpage88
dc.source.conferenceUltra Clean Processing of Semiconductor Surfaces XIV - UCPSS
dc.source.conferencedate2/09/2018
dc.source.conferencelocationLeuven Belgium
dc.source.endpage93
dc.title

Study of the anisotropic wet etching of nanoscale structures in alkaline solutions

dc.typeProceedings paper
dspace.entity.typePublication
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