Publication:

A record GmSAT/SSSAT and PBTI reliability in Si-passivated Ge nFinFETs by improved gate stack surface preparation

Date

2019-06
Proceedings Paper
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Author(s)

Arimura, Hiroaki  
;
Cott, Daire  
;
Boccardi, Guillaume  
;
Loo, Roger  
;
Wostyn, Kurt  
;
Brus, Stephan  
;
Capogreco, Elena  
;
Opdebeeck, Ann  
;
Witters, Liesbeth  
;
Conard, Thierry  
;
Suhard, Samuel  
;
van Dorp, Dennis  
;
Kenis, Karine  
;
Ragnarsson, Lars-Ake  
;
Mitard, Jerome  
;
Holsteyns, Frank  
;
De Heyn, Vincent  
;
Mocuta, Dan
;
Collaert, Nadine  
;
Horiguchi, Naoto  

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2011 since deposited on 2021-10-27
Acq. date: 2026-02-26

Citations

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2011 since deposited on 2021-10-27
Acq. date: 2026-02-26

Citations