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Accurate prediction of device performance in sub-10nm WFIN FinFETs using scalpel SSRM-based calibration of process simulations
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1911 since deposited on 2021-10-23
Acq. date: 2025-10-23
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1911 since deposited on 2021-10-23
Acq. date: 2025-10-23
Citations