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Nitrogen incorporation in HfSiO(N)/TaN gate stacks: impact on performances and NBTI
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1941 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
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Metrics
Views
1941 since deposited on 2021-10-16
1last month
Acq. date: 2025-12-10
Citations