Publication:
Nitrogen incorporation in HfSiO(N)/TaN gate stacks: impact on performances and NBTI
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1947 since deposited on 2021-10-16
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Acq. date: 2026-05-20
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Views
1947 since deposited on 2021-10-16
2last month
2last week
Acq. date: 2026-05-20
Citations