Publication:

Local potential measurements in silicon devices using atomic force microscopy with conductive tips

Date

1995
Proceedings Paper
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dc.contributor.authorTrenkler, Thomas
dc.contributor.authorDe Wolf, Peter
dc.contributor.authorSnauwaerts, Jan
dc.contributor.authorQamhieh, Z.
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorHellemans, L.
dc.contributor.imecauthorVandervorst, Wilfried
dc.date.accessioned2021-09-29T13:18:02Z
dc.date.available2021-09-29T13:18:02Z
dc.date.embargo9999-12-31
dc.date.issued1995
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/918
dc.source.beginpage477
dc.source.conference25th European Solid State Device Research Conference - ESSDERC
dc.source.conferencedate25/09/1995
dc.source.conferencelocationDen Haag The Netherlands
dc.source.endpage481
dc.title

Local potential measurements in silicon devices using atomic force microscopy with conductive tips

dc.typeProceedings paper
dspace.entity.typePublication
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