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Hermeticity investigation of sealed 0-level packages based on the damping characteristics of the MEMS device

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1859 since deposited on 2021-10-16
4last month
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Acq. date: 2026-10-09

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1859 since deposited on 2021-10-16
4last month
3last week
Acq. date: 2026-10-09

Citations