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Hermeticity investigation of sealed 0-level packages based on the damping characteristics of the MEMS device
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1849 since deposited on 2021-10-16
5last month
Acq. date: 2025-12-15
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Metrics
Views
1849 since deposited on 2021-10-16
5last month
Acq. date: 2025-12-15
Citations