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A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach

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2017 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-08

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2017 since deposited on 2021-10-19
1last month
Acq. date: 2025-12-08

Citations