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A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
Publication:
A comparative study of the microstructure–dielectric properties of crystalline SrTiO3 ALD films obtained via seed layer approach
Date
2011
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Popovici, Mihaela Ioana
;
Tomida, Kazuyuki
;
Swerts, Johan
;
Favia, Paola
;
Delabie, Annelies
;
Bender, Hugo
;
Adelmann, Christoph
;
Tielens, Hilde
;
Brijs, Bert
;
Kaczer, Ben
;
Pawlak, Malgorzata
;
Kim, Min-Soo
;
Altimime, Laith
;
Van Elshocht, Sven
;
Kittl, Jorge
Journal
Physica Status Solidi A
Abstract
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2012
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations
Metrics
Views
2012
since deposited on 2021-10-19
Acq. date: 2025-10-23
Citations